Colloidal Silica Manufacturing Process
Colloidal silica slurry is used for cmp process steps in ic manufacturing such as shallow trench isolation sti siox cmp w plug cmp cu barrier metal tanta for example cmp and cu metal cmp the wafer for this study was prepared by dipping it in a dilute slurry mixture then removing the wafer and rinsing it with di h 2 o deionized water